公开(公告)号：US06811369B2

公开(公告)日：2004-11-02

申请号：US10101706

申请日：2002-03-21

申请人： Kohei Yamada

发明人： Kohei Yamada

IPC分类号： B65G1133

CPC分类号： H01L21/6835 ,  H01L21/67769 ,  Y10S414/139 ,  Y10S414/14

摘要： In a semiconductor fabrication apparatus, a pod that receives a single substrate using a substrate supporting table and a lid member in a sealing state is loaded from outside of a chamber and the pod is opened within the chamber so as to enable the substrate received in the pod to be held and managed. The semiconductor fabrication apparatus includes a first pod conveyance device that transfers the pod from a pod loading position to a pod opening position, a pod opening device that causes the lid member of the pod transferred by said first pod conveyance device to be left outside the chamber and causes the supporting table to be separated into the chamber from the pod. A substrate storage rack provided within the chamber stores a plurality of substrates, and a substrate carrying device provided within the chamber takes out the substrate on the substrate supporting table and puts the substrate into the substrate storage rack.

摘要翻译： 在半导体制造装置中，使用基板支撑台和密封状态的盖构件接收单个基板的容器从室的外部被加载，并且在室内打开容器，使得容纳在 荚待被管理。 所述半导体制造装置包括将所述容器从容器装载位置传送到容器打开位置的第一容器输送装置，使由所述第一容置物输送装置转移的所述容器的盖部件留在所述室外的容器打开装置 并使支撑台与荚分离成室。 设置在所述室内的基板收容架存储多个基板，并且设置在所述室内的基板搬运装置将所述基板取出到所述基板支撑台上，并将所述基板放入所述基板收纳架。

公开(公告)号：US06679672B1

公开(公告)日：2004-01-20

申请号：US10384858

申请日：2003-03-10

申请人： John F. Barrows

发明人： John F. Barrows

IPC分类号： B65G1133

CPC分类号： H01L21/67727 ,  H01L21/67017 ,  H01L21/6773 ,  H01L21/67736 ,  H01L21/67775

摘要： A transfer port facilitates transfer of a material between clean room modules, and/or between a clean room module and a clean box transporter that can travel through the contaminated ambient environment. A transfer port permits transfer of clean material between Class 1 clean rooms without degrading their cleanliness levels. The clean box transporter cars each comprise a small self-propelled clean room with laminar air flow and a HEPA filter. A door on the clean box mates against a similar door on one wall of the clean room module. A seal between a transporter car door and its opening, and a seal between a clean room door and its opening, a pair of seals disposed inside and outside a split line together define a limited contaminated volume. This volume is evacuated and/or flushed with clean gas to remove as much particulate matter as possible. The clean box transporter car has a slight overpressure with respect to the clean room module so when the transporter port is opened, any remaining particles will move away from the opening and into the clean room module, where they are entrained away in its laminar air flow and filtered out.

摘要翻译： 传输端口有助于在洁净室模块之间传输材料，和/或在洁净室模块和可以穿过受污染的环境环境的清洁箱运输器之间进行。 转运港口允许在1级洁净室之间转移清洁材料，而不会降低其清洁度。 清洁箱运输车各自包括具有层流气流的小型自推进洁净室和HEPA过滤器。 洁净室上的门与洁净室模块的一面墙上的类似门相配合。 运输车门与其开口之间的密封以及洁净室门与其开口之间的密封，一对设置在分隔线内部和外部的密封件一起限定受污染的体积。 将该体积用清洁气体排空和/或冲洗，以尽可能多地除去颗粒物质。 清洁箱运输车相对于洁净室模块具有轻微的超压，因此当运输车口打开时，任何剩余的颗粒将从开口移动到洁净室模块中，在那里它们被夹带在其层流空气流中 并过滤掉。

公开(公告)号：US06530732B1

公开(公告)日：2003-03-11

申请号：US09084457

申请日：1998-05-26

申请人： Victor J. Theriault ,  Mark Ives

发明人： Victor J. Theriault ,  Mark Ives

IPC分类号： B65G1133

CPC分类号： H01L21/67751 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  Y10S414/135 ,  Y10S414/136 ,  Y10S414/139

摘要： A load lock and related method of handling a substrate involves placing a substrate onto a vertically movable poppet and moving the poppet between two vertically opposed subchambers such that in moving the poppet toward one of the subchambers, that subchamber is sealed to atmosphere. The two subchamber system allows one substrate to be placed into a buffer and another substrate to be cooled at the same time. Also, the system allows for a slow vacuum to be made on the substrate in a subchamber to avoid undesirably loading the substrate by the otherwise immediate drop in pressure.

摘要翻译： 负载锁定和处理衬底的相关方法涉及将衬底放置在可垂直移动的提升阀上并将提升阀移动到两个垂直相对的副室之间，使得在将提升阀朝向子室中的一个移动时，该子室被密封到大气中。 两个子室系统允许一个衬底被放置在缓冲器中，另一个衬底被同时被冷却。 此外，该系统允许在子室中在基板上进行缓慢的真空，以避免由于其它的即时压力下降而不期望地加载基板。

公开(公告)号：US06454515B2

公开(公告)日：2002-09-24

申请号：US09827931

申请日：2001-04-09

申请人： Akira Sato

发明人： Akira Sato

IPC分类号： B65G1133

CPC分类号： H01L21/67379 ,  H01L21/67386 ,  H01L21/68707 ,  Y10S206/832 ,  Y10S414/14

摘要： A jig for accommodating and transferring a carrier, the carrier having a first container with a first opening larger than the article, and the carrier having a first flange structure which extends from a peripheral portion of the first opening, the first flange structure having a first size defined to be a distance between opposite edges of the first flange structure in a first direction, the jig including a second container having a second opening with a second size larger than the first size of the first flange structure of the carrier, the jig further having a second flange structure in an opposite side to a side provided with the second opening, the second flange structure having a third size larger than the second size, the jig also having at least a window structure which extends at least opposite sides which is positioned adjacent to the second flange structure, so that the window structure is closer to the second opening than the second flange structure, the first opening of the carrier sealable with a part of an inner wall of the second container as the jig by making the first opening of the carrier contact with the part of the inner wall of the second container as the jig, and the window structure includes a flexible sheet deformable by an externally applied force.

摘要翻译： 一种用于容纳和转移载体的夹具，所述载体具有第一容器，所述第一容器具有比所述制品更大的第一开口，所述载体具有从所述第一开口的周边部分延伸的第一凸缘结构，所述第一凸缘结构具有第一 尺寸被限定为第一方向上的第一凸缘结构的相对边缘之间的距离，该夹具包括具有第二尺寸的第二开口的第二容器，第二开口的尺寸大于载体的第一凸缘结构的第一尺寸，夹具进一步 具有与设置有所述第二开口的一侧相反侧的第二凸缘结构，所述第二凸缘结构具有大于所述第二尺寸的第三尺寸，所述夹具还具有至少一个至少相对的侧面延伸的窗口结构， 与第二凸缘结构相邻，使得窗构件比第二凸缘结构更靠近第二开口， e载体与第二容器的内壁的一部分作为夹具通过使载体的第一开口与第二容器的内壁的一部分接触作为夹具而密封，并且窗结构包括柔性片可变形 通过外部施加的力量。

公开(公告)号：US06808352B2

公开(公告)日：2004-10-26

申请号：US10219820

申请日：2002-08-16

申请人： Hisaharu Seita

发明人： Hisaharu Seita

IPC分类号： B65G1133

CPC分类号： H01L21/67775 ,  H01L21/67379 ,  H01L21/67393 ,  H01L21/67772 ,  Y10S414/139 ,  Y10S414/14

摘要： A substrate container having substrates stored therein and sealed with a door is placed onto a load port apparatus provided on a substrate processing system, and a door of the load port apparatus is docked with the door of the substrate container. An inside of the substrate container is pressurized before opening of the door of the substrate container before the door of the substrate container is opened and the substrates stored in the substrate container is transported to the substrate processing system.

摘要翻译： 将具有存储在其中并用门密封的基板的基板容器放置在设置在基板处理系统上的装载口装置上，并且装载口装置的门与基板容器的门对接。 在打开基板容器的门之前，在打开基板容器的门之前，对基板容器的内部进行加压，将存储在基板容器中的基板输送到基板处理系统。

公开(公告)号：US06592317B1

公开(公告)日：2003-07-15

申请号：US09593245

申请日：2000-06-13

申请人： John M. Rush ,  Torben Ulander

发明人： John M. Rush ,  Torben Ulander

IPC分类号： B65G1133

CPC分类号： H01L21/68707

摘要： An end effector for a pod loader interface includes a gripper plate that attaches to the articulated arm. A pair of gripper blades are separated from each other along and are coupled to the gripper plate. During gripping of a wafer carrier, the gripper blades initially close toward each other and then draw nearer to the gripper plate. Nested outer and inner U-shaped yokes, which may attach the gripper plate to the articulated arm, are joined by rotational joints to permit their relative rotation for reorienting the wafer carrier. Yet other aspect of the present invention are a mechanical forearm drive that provides substantially linear motion of an articulated arm's wrist joint, and an end effector rotary-drive included in a forearm of the articulated arm.

摘要翻译： 用于荚果装载器接口的端部执行器包括附接到铰接臂的夹持板。 一对夹持器叶片彼此分离并且联接到夹持板。 夹持晶片载体时，夹持器叶片最初朝向彼此靠近，然后更靠近夹板。 可以将夹持板附接到铰接臂的嵌套外U形轭和内U形轭通过旋转接头连接，以允许它们相对旋转以重新定向晶片载体。 本发明的另一方面是提供关节臂的腕关节的基本线性运动的机械前臂驱动器，以及包括在铰接臂的前臂中的末端执行器旋转驱动器。

公开(公告)号：US06361268B1

公开(公告)日：2002-03-26

申请号：US09598825

申请日：2000-06-21

申请人： Ronald E. Pelrine ,  Jonathan R. Heim

发明人： Ronald E. Pelrine ,  Jonathan R. Heim

IPC分类号： B65G1133

CPC分类号： H01L21/67709 ,  B65G54/02 ,  F16C39/063 ,  G03F7/70758

摘要： A frictionless transport apparatus for transporting an object from a first to a second station is disclosed. The apparatus has a frame extending between the first and second stations and a carriage mounted for movement along said frame, in a levitated condition. A substantial portion of the weight of the carriage and load is supported by biasing magnets on the frame and carriage. The carriage and load are stabilized in a levitated condition by magnetic interactions between a diamagnetic plate on the carriage and a magnetic array extending along the frame. The carriage is moved in its levitated condition by a frictionless drive system, such as an electromagnetic, electrostatic, or pneumatic drive system. Also disclosed is a method of frictionless transport of an object between first and second stations.

公开(公告)号：US06764265B2

公开(公告)日：2004-07-20

申请号：US10041291

申请日：2002-01-07

申请人： Charles S. Kunze ,  Andrew V. Le ,  Muhammad Rasheed

发明人： Charles S. Kunze ,  Andrew V. Le ,  Muhammad Rasheed

IPC分类号： B65G1133

CPC分类号： F16K51/02 ,  Y10S414/139

摘要： Embodiments of the present invention provide structures for reducing erosion of a slit valve utilized in the fabrication of semiconductor devices. Specifically, non-metallic slit valve components such as a compressible sealing member and a barrier that assist in sealing the valve closure against the slit valve seat, are positioned on the valve seat rather than on the valve closure. This orientation removes the seal and the seal barrier from the direct line of sight of the plasma within the processing chamber, reducing exposure of the sealing member and seal barrier slit valve components to erosion and thereby extending the lifetime of the valve.

摘要翻译： 本发明的实施例提供了用于减少用于制造半导体器件的狭缝阀的侵蚀的结构。 具体而言，诸如可压缩密封构件和有助于将阀门关闭密封在狭缝阀座上的屏障的非金属狭缝阀部件定位在阀座而不是阀闭合件上。 该方向将密封件和密封件阻挡物从处理室内的等离子体的直接视线移除，减少了密封构件的暴露并将阻挡狭缝阀部件密封，从而延长了阀的使用寿命。

公开(公告)号：US06435808B1

公开(公告)日：2002-08-20

申请号：US09722907

申请日：2000-11-27

申请人： Shinichi Araya ,  Kouji Kudou ,  Akihiro Katou ,  Hitoshi Nakayama ,  Masakazu Toki ,  Kazuya Abe

发明人： Shinichi Araya ,  Kouji Kudou ,  Akihiro Katou ,  Hitoshi Nakayama ,  Masakazu Toki ,  Kazuya Abe

IPC分类号： B65G1133

CPC分类号： H05K13/0812

摘要： A chip mounting apparatus capable of permitting a chip mounting operation to be executed at an increased speed and ensuring continuous running of the apparatus over a long period of time. The apparatus includes a chip observing camera mounted on the side of a chip mounting head, a lighting unit mounted on the side of the chip mounting head to light a background of a chip hold on a chip suction nozzle of the head, a reflection unit mounted on the side of the chip mounting head to input an image of the chip to the chip observing camera, feeder and stocker sections each adapted to replaceably held a chip storage package therein, and a package replacement mechanism for carrying out replacement of the chip storage package between both sections.

摘要翻译： 一种芯片安装装置，其能够以更高的速度进行芯片安装操作，并且确保设备在长时间内的连续运行。 该装置包括安装在芯片安装头侧的芯片观察摄像机，安装在芯片安装头一侧的照明单元，以照亮头部的芯片吸嘴上的芯片保持器的背景，安装有反射单元 在芯片安装头的侧面，将芯片的图像输入到芯片观察摄像机，馈送器和储片器部分，每个适配器可更换地保持其中的芯片存储包装;以及封装更换机构，用于执行芯片存储封装 两部分之间。

公开(公告)号：US06264420B1

公开(公告)日：2001-07-24

申请号：US09423978

申请日：1999-11-17

申请人： Arne Bieringer ,  Ernst-Norbent Krause

发明人： Arne Bieringer ,  Ernst-Norbent Krause

IPC分类号： B65G1133

CPC分类号： B65H7/14 ,  B65H2511/413 ,  B65H2511/512 ,  B65H2511/52 ,  B65H2553/42 ,  B65H2553/80 ,  B65H2220/01 ,  B65H2220/02 ,  B65H2220/03

摘要： A device is provided for monitoring sheets from which cards with a monetary value and/or identity cards are punched, where the cards are arranged in rows on the sheets. The device is configured such that the number of cameras used is independent of the number of rows of cards. The device has a table on which at least two sheets can be laid. A camera can be moved along and across the table, and a conveyor device travels along the table above the camera.

摘要翻译： 提供了一种用于监视纸张的装置，具有金钱价值和/或身份证卡的卡被打孔，其中卡片被排列成片材上的行。 该设备被配置为使得所使用的摄像机的数量与卡的行数无关。 该装置具有至少可以铺设两张纸的桌子。 相机可以沿着桌子移动，并且传送装置沿着相机上方的桌子行进。