Invention Grant
US06573147B2 Method of forming a semiconductor device having contact using crack-protecting layer
有权
使用裂纹保护层形成具有接触的半导体器件的方法
- Patent Title: Method of forming a semiconductor device having contact using crack-protecting layer
- Patent Title (中): 使用裂纹保护层形成具有接触的半导体器件的方法
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Application No.: US10055260Application Date: 2001-10-26
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Publication No.: US06573147B2Publication Date: 2003-06-03
- Inventor: Kwang-jin Moon , Hee-sook Park , Myoung-bum Lee
- Applicant: Kwang-jin Moon , Hee-sook Park , Myoung-bum Lee
- Main IPC: H01L21331
- IPC: H01L21331

Abstract:
A semiconductor device having a contact using a crack-protecting layer and a method of forming the same are provided. The crack-protecting layer formed of a dielectric material is formed on an interlayer dielectric layer. The crack-protecting layer relieves or absorbs residual stress generated on a conductive layer used in forming a contact plug. Thus, a contact can be formed without damage to the interlayer dielectric layer due to residual stress.
Public/Granted literature
- US20020125543A1 Semiconductor device having contact using crack-protecting layer and method of forming the same Public/Granted day:2002-09-12
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