Invention Grant
US06573147B2 Method of forming a semiconductor device having contact using crack-protecting layer 有权
使用裂纹保护层形成具有接触的半导体器件的方法

Method of forming a semiconductor device having contact using crack-protecting layer
Abstract:
A semiconductor device having a contact using a crack-protecting layer and a method of forming the same are provided. The crack-protecting layer formed of a dielectric material is formed on an interlayer dielectric layer. The crack-protecting layer relieves or absorbs residual stress generated on a conductive layer used in forming a contact plug. Thus, a contact can be formed without damage to the interlayer dielectric layer due to residual stress.
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