发明授权
US06576178B2 Resin sealing apparatus and resin sealing method 失效
树脂密封装置和树脂密封方法

  • 专利标题: Resin sealing apparatus and resin sealing method
  • 专利标题(中): 树脂密封装置和树脂密封方法
  • 申请号: US09740956
    申请日: 2000-12-21
  • 公开(公告)号: US06576178B2
    公开(公告)日: 2003-06-10
  • 发明人: Hideki MizunoKiyomitsu Ishimura
  • 申请人: Hideki MizunoKiyomitsu Ishimura
  • 优先权: JP11-364148 19991222
  • 主分类号: B29C4514
  • IPC分类号: B29C4514
Resin sealing apparatus and resin sealing method
摘要:
An apparatus for sealing a resin uses a liquid resin. A substrate has a frame for surrounding the substrate and is provided with a plurality of semiconductor devices. The substrate has a first opening portion. A squeegee guide plate is placed on the frame and has a second opening portion. The second opening portion is larger than first opening portion in size. A first squeegee moves along the squeegee guide plate in a first direction and rakes the liquid resin. The liquid resin is protuberated in order to bury the semiconductor devices. A second squeegee moves along the squeegee guide plate in a second direction opposite to the first direction and further rakes the liquid resin so as to smooth a surface of the liquid resin. A turning mechanism serves to turn the second squeegee in a circular arc form during the movement of the second squeegee.
公开/授权文献
信息查询
0/0