发明授权
US06576528B1 Capacitor for semiconductor memory device and method of manufacturing the same 失效
半导体存储器件的电容器及其制造方法

  • 专利标题: Capacitor for semiconductor memory device and method of manufacturing the same
  • 专利标题(中): 半导体存储器件的电容器及其制造方法
  • 申请号: US09607130
    申请日: 2000-06-28
  • 公开(公告)号: US06576528B1
    公开(公告)日: 2003-06-10
  • 发明人: Kee Jeung LeeDong Jun Kim
  • 申请人: Kee Jeung LeeDong Jun Kim
  • 优先权: KR99-25465 19990629
  • 主分类号: H01L2120
  • IPC分类号: H01L2120
Capacitor for semiconductor memory device and method of manufacturing the same
摘要:
Disclosed are a capacitor for semiconductor devices capable of increasing storage capacitance and preventing leakage current, and method of manufacturing the same. The capacitor for semiconductor memory devices according to the present invention includes: a lower electrode; a dielectric layer formed on the lower electrode; and an upper electrode formed on the upper portion of the dielectric layer, wherein the dielectric layer is a crystalline TaxOyNz layer, and the total of x, y, and z in the crystalline TaxOyNz layer is 1, and y is 0.3 to 0.5, and z is 0.1 to 0.3.
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