发明授权
- 专利标题: Capacitive ceramic relative-pressure sensor
- 专利标题(中): 电容式陶瓷相对压力传感器
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申请号: US09592127申请日: 2000-06-12
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公开(公告)号: US06578427B1公开(公告)日: 2003-06-17
- 发明人: Frank Hegner
- 申请人: Frank Hegner
- 优先权: EP99111580 19990615
- 主分类号: G01L912
- IPC分类号: G01L912
摘要:
This relative-pressure sensors has virtually no zero offset at relative humidities up to near the saturation limit. The sensor has a diaphragm (11) having a surface on which a electrode (13) is deposited and a substrate (12) having a bore (23) for guiding reference air from af first surface to an opposite surface. The first surface is polished and provided with at least an addional electrode (15). The substrate and the diaphragm are soldered or brazed together along the periphery by means of a spacer (20) to form a chamber which is covered from inside with a thin layer (24) of hydrophobic material that is introduced through the bore after the soldering or brazing.
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