Invention Grant
- Patent Title: Micro-opto-electro-mechanical system (MOEMS)
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Application No.: US09844574Application Date: 2001-04-30
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Publication No.: US06580858B2Publication Date: 2003-06-17
- Inventor: Jingkuang Chen , Joel A. Kubby , Decai Sun
- Applicant: Jingkuang Chen , Joel A. Kubby , Decai Sun
- Main IPC: G02B642
- IPC: G02B642

Abstract:
A MEMS-based adjustable mirror module allows faster, lower cost, and easier alignment of optical fibers in substrates. Movable mirrors formed on the substrate allow adjustment of the light path after the optical fiber is attached, after which the mirrors are affixed in place to prevent misalignment.
Public/Granted literature
- US20020168144A1 Micro-opto-electro-mechanical system (MOEMS) Public/Granted day:2002-11-14
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