发明授权
- 专利标题: Robot for handling semiconductor wafers
- 专利标题(中): 用于处理半导体晶片的机器人
-
申请号: US10135261申请日: 2002-04-29
-
公开(公告)号: US06582175B2公开(公告)日: 2003-06-24
- 发明人: Damon Cox , Martin R. Elliott , Chris Pencis , Jeffrey C. Hudgens , Michael Robert Rice
- 申请人: Damon Cox , Martin R. Elliott , Chris Pencis , Jeffrey C. Hudgens , Michael Robert Rice
- 主分类号: B65G100
- IPC分类号: B65G100
摘要:
A multi-set robot is provided that includes a first robot set having a first motor coupled to a first rotatable member that is rotatable about an axis; a second motor coupled to a second rotatable member that is rotatable about the axis; a first plurality of blades vertically spaced from one another; and a first linkage adapted to enable coordinated movement of the blades on rotation of the first and second rotatable members. The robot also includes a second robot set positioned above the first robot set having a third motor coupled to a third rotatable member that is rotatable about the axis; a fourth motor coupled to a fourth rotatable member that is rotatable about the axis; a second plurality of blades vertically spaced from one another; and a second linkage adapted to enable coordinated movement of the blades on rotation of the third and fourth rotatable members. Other aspects are provided.
公开/授权文献
- US20030035709A1 Robot for handling semiconductor wafers 公开/授权日:2003-02-20
信息查询