公开(公告)号：US07857570B2

公开(公告)日：2010-12-28

申请号：US12100388

申请日：2008-04-09

Applicant: Martin R. Elliott ,  Michael R. Rice ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

Inventor： Martin R. Elliott ,  Michael R. Rice ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC: B65G49/07

CPC classification number: H01L21/67775 ,  Y10S414/14

Abstract: In one aspect, a substrate loading station for a processing tool includes plural load ports. Each load port is operatively coupled to the processing tool and has a mechanism for opening a substrate carrier. A carrier handler transports substrate carriers from a factory exchange location to the load ports without placing the carriers on any carrier support location other than the load ports. Numerous other aspects are provided.

Abstract translation: 一方面，用于处理工具的基板装载站包括多个装载端口。 每个负载端口可操作地耦合到处理工具并且具有用于打开衬底载体的机构。 载体处理器将基板载体从工厂交换位置传送到负载端口，而不将载体放置在除负载端口之外的任何载体支撑位置上。 提供了许多其他方面。

公开(公告)号：US07720558B2

公开(公告)日：2010-05-18

申请号：US11220897

申请日：2005-09-06

Applicant: Martin R. Elliott ,  Vinay Shah

Inventor： Martin R. Elliott ,  Vinay Shah

IPC: G06F19/00 ,  H01L21/677 ,  B65G1/133

CPC classification number: H01L21/67265

Abstract: In a first aspect, a first method of mapping contents of a substrate carrier is provided. The first method includes the steps of (1) coupling a sensor to the substrate carrier or a loadport adapted to receive the substrate carrier; and (2) determining a presence or absence of a substrate in a slot of the substrate carrier using the sensor. Numerous other aspects are provided.

Abstract translation: 在第一方面，提供了一种映射衬底载体的内容的第一种方法。 第一种方法包括以下步骤：（1）将传感器耦合到衬底载体或适于接收衬底载体的负载端口; 和（2）使用传感器确定衬底载体的槽中是否存在衬底。 提供了许多其他方面。

公开(公告)号：US07611319B2

公开(公告)日：2009-11-03

申请号：US11154932

申请日：2005-06-16

Applicant: Vinay Shah ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric Andrew Englhardt

Inventor： Vinay Shah ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric Andrew Englhardt

IPC: B65B69/00

CPC classification number: H01L21/67265 ,  H01L21/67379 ,  H01L21/67775 ,  Y10S414/135 ,  Y10S414/14

Abstract: In at least one aspect, a system is provided that includes (1) a substrate carrier having first docking features; and (2) a loadport having second docking features. The second docking features are adapted to block docking of substrate carriers that do not include the first docking features and to allow docking of substrate carriers that include the first docking features. Numerous other aspects are provided.

Abstract translation: 在至少一个方面，提供了一种系统，其包括（1）具有第一对接特​​征的衬底载体; 和（2）具有第二对接特征的装载端口。 第二对接特征适于阻止不包括第一对接特​​征的衬底载体的对接并允许对接包括第一对接特​​征的衬底载体。 提供了许多其他方面。

公开(公告)号：US07594789B2

公开(公告)日：2009-09-29

申请号：US11838501

申请日：2007-08-14

Applicant: Michael R. Rice ,  Martin R. Elliott ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

Inventor： Michael R. Rice ,  Martin R. Elliott ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC: B65G17/02

CPC classification number: H01L21/6773 ,  H01L21/67733 ,  H01L21/67769 ,  H01L21/67778

Abstract: In a first aspect, a first apparatus is provided for use in supporting a substrate carrier. The first apparatus includes an overhead transfer flange adapted to couple to a substrate carrier body and an overhead carrier support. The overhead transfer flange has a first side and a second side opposite the first side that is wider than the first side. Numerous other aspects are provided.

Abstract translation: 在第一方面，提供了一种用于支撑衬底载体的第一装置。 第一装置包括适于联接到衬底载体主体和架空托架支架的架空输送凸缘。 架空输送法兰具有比第一侧宽的第一侧和与第一侧相对的第二侧。 提供了许多其他方面。

公开(公告)号：US07552816B2

公开(公告)日：2009-06-30

申请号：US11619183

申请日：2007-01-02

Applicant: Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

Inventor： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

IPC: B65G43/08

CPC classification number: H01L21/68707 ,  H01L21/6773 ,  H01L21/67733

Abstract: A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.

公开(公告)号：US07540371B2

公开(公告)日：2009-06-02

申请号：US11619181

申请日：2007-01-02

Applicant: Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

Inventor： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

IPC: B65G47/34

CPC classification number: H01L21/68707 ,  H01L21/6773 ,  H01L21/67733

Abstract: A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.

公开(公告)号：US07537108B2

公开(公告)日：2009-05-26

申请号：US11838354

申请日：2007-08-14

Applicant: Michael R. Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

Inventor： Michael R. Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC: B65G17/02

CPC classification number: H01L21/67706 ,  B65G17/20 ,  B65G37/02 ,  B65G2201/0297 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67769 ,  H01L21/67778 ,  Y10S414/135

Abstract: According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.

公开(公告)号：US07506747B2

公开(公告)日：2009-03-24

申请号：US11495055

申请日：2006-07-28

Applicant: Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

Inventor： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

IPC: B65G29/00

CPC classification number: H01L21/68707 ,  H01L21/6773 ,  H01L21/67733

Abstract: A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.

公开(公告)号：US07346431B2

公开(公告)日：2008-03-18

申请号：US11555240

申请日：2006-10-31

Applicant: Michael Robert Rice ,  Martin R. Elliott ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric Andrew Englhardt

Inventor： Michael Robert Rice ,  Martin R. Elliott ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric Andrew Englhardt

IPC: G06F19/00

CPC classification number: B65G37/02 ,  B65G47/61 ,  B65G2201/0297 ,  H01L21/67769 ,  H01L21/67775 ,  H01L21/67778

Abstract: In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.

Abstract translation: 在第一方面中，基板装载站由连续输送基板载体的输送机供给。 作为基板装载站的一部分的基板载体处理器在输送机运动的同时与输送机交换基板载体。 载体交换过程可以包括以基本匹配输送机速度的速度移动基底载体处理器的端部执行器。 提供了许多其他方面。

公开(公告)号：US07258520B2

公开(公告)日：2007-08-21

申请号：US10650312

申请日：2003-08-28

Applicant: Martin R. Elliott ,  Michael Robert Rice ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric Andrew Englhardt ,  Loy Randall Stuart

Inventor： Martin R. Elliott ,  Michael Robert Rice ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric Andrew Englhardt ,  Loy Randall Stuart

IPC: B65B59/00 ,  H01L21/67

CPC classification number: H01L21/67353 ,  H01L21/67373 ,  H01L21/67379 ,  H01L21/67386 ,  H01L21/67772 ,  Y10S414/139

Abstract: A system for opening a substrate carrier includes a substrate carrier having an openable portion. The substrate carrier also has an opening mechanism coupled to the openable portion. A substrate transfer location has a support adapted to support a substrate carrier. The substrate transfer location also has an actuator mechanism. The actuator mechanism is positioned relative to the support so as to interact with the opening mechanism of the substrate carrier. The actuator mechanism of the substrate transfer location and the opening mechanism of the substrate carrier are adapted to interface with each other at the substrate transfer location so as to employ movement of the substrate carrier to achieve opening and closing of the substrate carrier.

Abstract translation: 用于打开衬底载体的系统包括具有可打开部分的衬底载体。 衬底托架还具有联接到可打开部分的打开机构。 衬底转移位置具有适于支撑衬底载体的支撑件。 基板转印位置也具有致动器机构。 致动器机构相对于支撑件定位，以便与衬底载体的开启机构相互作用。 衬底传送位置的致动器机构和衬底载体的打开机构适于在衬底传送位置处彼此接合，以便采用衬底载体的移动来实现衬底载体的打开和闭合。