发明授权
- 专利标题： Polymer-assisted aqueous deposition of metal oxide films
- 专利标题（中）： 金属氧化物膜的聚合物辅助水沉积
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申请号： US09629116申请日： 2000-07-31
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公开(公告)号： US06589457B1公开(公告)日： 2003-07-08
- 发明人: DeQuan Li , Quanxi Jia
- 申请人： DeQuan Li , Quanxi Jia
- 主分类号： B29C4100
- IPC分类号： B29C4100
摘要：
An organic solvent-free process for deposition of metal oxide thin films is presented. The process includes aqueous solutions of necessary metal precursors and an aqueous solution of a water-soluble polymer. After a coating operation, the resultant coating is fired at high temperatures to yield optical quality metal oxide thin films.
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