发明授权
- 专利标题: 2-bit mask ROM device and fabrication method thereof
- 专利标题(中): 2位掩模ROM器件及其制造方法
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申请号: US10064906申请日: 2002-08-28
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公开(公告)号: US06590266B1公开(公告)日: 2003-07-08
- 发明人: Mu-Yi Liu , Tso-Hung Fan , Kwang-Yang Chan , Yen-Hung Yeh , Tao-Cheng Lu
- 申请人: Mu-Yi Liu , Tso-Hung Fan , Kwang-Yang Chan , Yen-Hung Yeh , Tao-Cheng Lu
- 主分类号: H01L2994
- IPC分类号: H01L2994
摘要:
A 2-bit mask ROM device and a fabrication method thereof are described. The 2-bit mask ROM device includes a substrate; a gate structure, disposed on a part of the substrate; a 2-bit code region, configured in the substrate beside both sides of the gate structure; at least one spacer, disposed on both sides of the gate structure; a buried drain region, configured in the substrate beside both sides of the spacer; a doped region, configured in the substrate between the buried drain region and the 2-bit code region, wherein the dopant type of the doped region is different from that for the 2-bit code region and the dopant concentration in the doped region is higher than that in the 2-bit code region; an insulation layer, disposed above the buried drain region; and a word line disposed on the gate structures along a same row.
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