Invention Grant
- Patent Title: Method for forming a metal pattern on a dielectric substrate
- Patent Title (中): 在电介质基板上形成金属图案的方法
-
Application No.: US09852384Application Date: 2001-05-10
-
Publication No.: US06593249B2Publication Date: 2003-07-15
- Inventor: Heinrich Meyer , Udo Grieser
- Applicant: Heinrich Meyer , Udo Grieser
- Priority: DE10112023 20010307
- Main IPC: H01L2131
- IPC: H01L2131

Abstract:
A method of reproducibly manufacturing circuit carriers with very fine circuit structures, more specifically with structure widths of 50 &mgr;m and less, is described in which a substrate provided with a base metal surface is provided, a layer of varnish is applied onto the substrate by an electrophoretic method, the layer of varnish is ablated in at least parts of the regions that do not correspond to the metal pattern to be formed, the base metal surface being laid bare, the bare base metal surface is etched, the layer of varnish being ablated by means of ultraviolet irradiation, more specifically with an ultraviolet laser beam.
Public/Granted literature
- US20030036288A1 Method for forming a metal pattern on a dielectric substrate Public/Granted day:2003-02-20
Information query