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US06593249B2 Method for forming a metal pattern on a dielectric substrate 失效
在电介质基板上形成金属图案的方法

  • Patent Title: Method for forming a metal pattern on a dielectric substrate
  • Patent Title (中): 在电介质基板上形成金属图案的方法
  • Application No.: US09852384
    Application Date: 2001-05-10
  • Publication No.: US06593249B2
    Publication Date: 2003-07-15
  • Inventor: Heinrich MeyerUdo Grieser
  • Applicant: Heinrich MeyerUdo Grieser
  • Priority: DE10112023 20010307
  • Main IPC: H01L2131
  • IPC: H01L2131
Method for forming a metal pattern on a dielectric substrate
Abstract:
A method of reproducibly manufacturing circuit carriers with very fine circuit structures, more specifically with structure widths of 50 &mgr;m and less, is described in which a substrate provided with a base metal surface is provided, a layer of varnish is applied onto the substrate by an electrophoretic method, the layer of varnish is ablated in at least parts of the regions that do not correspond to the metal pattern to be formed, the base metal surface being laid bare, the bare base metal surface is etched, the layer of varnish being ablated by means of ultraviolet irradiation, more specifically with an ultraviolet laser beam.
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