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US06593765B1 Testing apparatus and testing method for semiconductor integrated circuit 失效
半导体集成电路测试仪器及测试方法

Testing apparatus and testing method for semiconductor integrated circuit
摘要:
A testing apparatus is able to test a semiconductor integrated circuit with high observability. The testing apparatus includes a test pattern inputting means 14 for inputting a test pattern for activating a path under test of a semiconductor integrated circuit 20 to the semiconductor integrated circuit, a transient power supply current measuring means 16 for measuring transient power supply current supplied to the semiconductor integrated circuit while the path under test is being activated, and a fault detecting means 34 for judging absence and presence of a fault of the path under test, based on transient power supply current measured by the transient power supply current measuring means.
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