- 专利标题: Adjusting apparatus for an optical element in a lens system
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申请号: US10039841申请日: 2002-01-03
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公开(公告)号: US06594093B2公开(公告)日: 2003-07-15
- 发明人: Timo Moeller , Bernhard Gellrich
- 申请人: Timo Moeller , Bernhard Gellrich
- 优先权: DE10100546 20010108
- 主分类号: G02B702
- IPC分类号: G02B702
摘要:
In the case of an adjusting apparatus for an optical element in a lens system, in particular a lens in a projection lens system for semiconductor lithography, for producing tilting movements, having at least one actuator, the optical element is connected via elastic connecting members, directly or indirectly via an inner mount, to an outer mount. The elastic connecting members or the at least one actuator are/is provided in each case with bearing bridges which have bearing locations for a connection to the optical element or to the inner mount, and bridge arms which are connected to the bearing locations. The bridge arms are provided with piezoceramic elements in plate or sheet form which undergo changes in length upon activation. The piezoceramic elements of the various bearing bridges can be activated individually or together.
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