发明授权
- 专利标题: Regeneration of plating baths and system therefore
- 专利标题(中): 因此电镀浴和系统的再生
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申请号: US09651016申请日: 2000-08-30
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公开(公告)号: US06596148B1公开(公告)日: 2003-07-22
- 发明人: Brett Matthew Belongia , Zhen Wu Lin , John E. Pillion , Jieh-Hwa Shyu
- 申请人: Brett Matthew Belongia , Zhen Wu Lin , John E. Pillion , Jieh-Hwa Shyu
- 主分类号: C25D2118
- IPC分类号: C25D2118
摘要:
The present invention provides a system and method for selectively removing one or more organic and also preferably one or more inorganic contaminants from plating baths. More particularly, the invented method relates to the use of a source of energy in combination with chemical oxidants, alone or in conjunction with a catalyst to oxidize organic contaminants in the plating bath to a level such that the electroplating bath can be recovered and reused after appropriate chemical adjustment. The oxidative treatment method may be a continuous process or a batch process that is performed in a single pass and the endpoint of the oxidative process detected by a sensor. Residual organics, if desired, and chloride ions in the bath are removed from the solution by a chemisorption or physisorption treatment. Inorganic contaminants are removed from the electroplating bath by selective ion exchange resins or electrodialysis, while particulate and suspended colloidal particles are removed by filtration before the treated plating bath is recycled.
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