发明授权
US06599587B2 Organometallic precursor for forming metal pattern and method of forming metal pattern using the same
失效
用于形成金属图案的有机金属前体和使用其形成金属图案的方法
- 专利标题: Organometallic precursor for forming metal pattern and method of forming metal pattern using the same
- 专利标题(中): 用于形成金属图案的有机金属前体和使用其形成金属图案的方法
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申请号: US10238595申请日: 2002-09-11
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公开(公告)号: US06599587B2公开(公告)日: 2003-07-29
- 发明人: Min Chul Chung , Soon Taik Hwang , Young Hun Byun , Euk Che Hwang
- 申请人: Min Chul Chung , Soon Taik Hwang , Young Hun Byun , Euk Che Hwang
- 优先权: KR2001-55755 20010911
- 主分类号: B05D306
- IPC分类号: B05D306
摘要:
Disclosed is an organometallic precursor for forming a metal pattern, having a structure defined by the following Formula 1, and a method of forming the metal pattern using the same, in which the conductive metal pattern is readily formed through an exposing step without using a photo-resist. L′—M—L Formula 1 wherein, M is a transition metal selected from the group consisting of Ag, Au, Cu, Pd, Ni, and Pt; L is an imidazolylidene compound having a structure defined by the following Formula 2; and L′ is an imidazolylidene compound having a structure defined by the following Formula 2 or a &bgr;-diketonate compound having a structure defined by the following Formula 3: wherein, R1, R2, R3, and R4 are independently a hydrogen atom, or alkyl group, alkenyl group, alkynyl group, carboxyl group, alkoxy group, or ester group with 1 to 20 carbons, or aromatic hydrocarbon group with 6 to 20 carbons; and wherein, R5, R6, and R7 are independently a hydrogen atom, or alkyl group, alkenyl group, alkynyl group, carboxyl group, alkoxy group, or ester group with 1 to 20 carbons, or aromatic hydrocarbon group with 6 to 20 carbons.
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