发明授权
US06602606B1 Glass sheet with conductive film, method of manufacturing the same, and photoelectric conversion device using the same 有权
具有导电膜的玻璃板,其制造方法以及使用其的光电转换装置

Glass sheet with conductive film, method of manufacturing the same, and photoelectric conversion device using the same
摘要:
On a glass sheet, an undercoating layer and a conductive film containing tin oxide as a main component are formed suitably in this order. On the conductive film, a photoelectric conversion unit and a back electrode are formed, thus obtaining a thin film photoelectric conversion device. In the present invention, the absorption coefficient of this conductive film is decreased up to 1.2×103 cm−1 or less. In another embodiment of the present invention, the chlorine concentration in a conductive film is set to be 0.11 wt. % or lower and the fluorine concentration in the conductive film is equal to or higher than the chlorine concentration. In still another embodiment, in a wavelength of 550 nm, a conductive film is formed so that a glass sheet with a conductive film has a transmittance of at least 79% and a haze ratio of at least 4%.
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