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US06602649B2 Photoresist monomers, polymers thereof and photoresist compositions containing the same 失效
光致抗蚀剂单体,其聚合物和含有它们的光致抗蚀剂组合物

  • Patent Title: Photoresist monomers, polymers thereof and photoresist compositions containing the same
  • Patent Title (中): 光致抗蚀剂单体,其聚合物和含有它们的光致抗蚀剂组合物
  • Application No.: US09882191
    Application Date: 2001-06-15
  • Publication No.: US06602649B2
    Publication Date: 2003-08-05
  • Inventor: Chi Hyeong RohSeung Hyuk LeeChan Seob Cho
  • Applicant: Chi Hyeong RohSeung Hyuk LeeChan Seob Cho
  • Priority: KR2000-32983 20000615
  • Main IPC: G03F7004
  • IPC: G03F7004
Photoresist monomers, polymers thereof and photoresist compositions containing the same
Abstract:
Photoresist monomers which can be used to form photoresist polymers and photoresist compositions using the same which are suitable for photolithography processes employing a deep ultraviolet light source and copolymers thereof. Monomers are represented by following Formula 1: wherein, R1, is —OH or —R—OH; R represents substituted or unsubstituted linear or branched (C1-C10) alkylene, substituted or unsubstituted (C1-C10) alkylene comprising an ether linkage, substituted or unsubstituted (C1-C10) alkylene comprising an ester linkage, or substituted or unsubstituted (C1-C10) alkylene comprising an ketone moiety; and 1 is an integer of 1 or 2.
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