Invention Grant
- Patent Title: Cathode target mounting for cathodic arc cathodes
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Application No.: US09825126Application Date: 2001-04-03
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Publication No.: US06608432B2Publication Date: 2003-08-19
- Inventor: Scott Andrew Weaver , Don Mark Lipkin , Reed Roeder Corderman , Terry Clifford Cooper
- Applicant: Scott Andrew Weaver , Don Mark Lipkin , Reed Roeder Corderman , Terry Clifford Cooper
- Main IPC: H01J1726
- IPC: H01J1726

Abstract:
An apparatus for cathodic arc coating. The apparatus includes: a vacuum chamber which includes an anode; a power supply; and a cathode target assembly connected to the power supply. The cathode target assembly includes a cathode target and a target holder. In the preferred embodiment, a conductive interlayer is located between the cathode target and the target holder, and a cooling block is in contact with the cathode target.
Public/Granted literature
- US20020140334A1 Cathode target mounting for cathodic arc cathodes Public/Granted day:2002-10-03
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