- 专利标题: Method for manufacturing a microintegrated structure with buried connections, in particular an integrated microactuator for a hard-disk drive unit
-
申请号: US10124781申请日: 2002-04-16
-
公开(公告)号: US06610556B2公开(公告)日: 2003-08-26
- 发明人: Benedetto Vigna , Paolo Ferrari
- 申请人: Benedetto Vigna , Paolo Ferrari
- 优先权: EP99830158 19990322
- 主分类号: H01L2100
- IPC分类号: H01L2100
摘要:
The method is intended for manufacturing a microintegrated structure, typically a microactuator for a hard-disk drive unit and includes the steps of: forming interconnection regions in a substrate of semiconductor material; forming a monocrystalline epitaxial region; forming lower sinker regions in the monocrystalline epitaxial region and in direct contact with the interconnection regions; forming insulating material regions on a structure portion of the monocrystalline epitaxial region; growing a pseudo-epitaxial region formed by a polycrystalline portion above the structure portion of the monocrystalline epitaxial region and elsewhere a monocrystalline portion; and forming upper sinker regions in the polycrystalline portion of the pseudo-epitaxial region and in direct contact with the lower sinker regions. In this way no PN junctions are present inside the polycrystalline portion of the pseudo-epitaxial region and the structure has a high breakdown voltage.
公开/授权文献
信息查询