Invention Grant
US06616769B2 Systems and methods for conditioning ultra high purity gas bulk containers 有权
用于调节超高纯度气体散装容器的系统和方法

Systems and methods for conditioning ultra high purity gas bulk containers
Abstract:
A process and system for conditioning a bulk container for ultra-high purity liquefied gas. Vapor is generated in the container from a conditioning quantity of the ultra-high purity liquefied gas by imposing a temperature difference on the container so that the vapor condenses when a temperature difference is achieved. The resulting liquid reflux, e.g., the condensed liquid drips or flows back to the conditioning quantity of the liquified gas, washes or removes contaminants, e.g., particles, metal and moisture, from the interior surface of the container. A portion of the vapor is vented from the container for reclamation. The used conditioning liquid may also be reclaimed.
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