Invention Grant
- Patent Title: Method of forming metal fuse and bonding pad
- Patent Title (中): 形成金属熔丝和焊盘的方法
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Application No.: US09835014Application Date: 2001-04-13
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Publication No.: US06617234B2Publication Date: 2003-09-09
- Inventor: Sung-Hsiung Wang , Yimin Huang , Chiung-Sheng Hsiung
- Applicant: Sung-Hsiung Wang , Yimin Huang , Chiung-Sheng Hsiung
- Priority: TW90108258A 20010406
- Main IPC: H01L2144
- IPC: H01L2144

Abstract:
A method of forming metal fuses and bonding pads. A conductive layer is formed in a substrate. A dielectric layer is formed over the substrate. The dielectric layer has an opening that exposes a portion of the conductive layer. A metallic layer is formed over the dielectric layer. The metallic layer is patterned to form a metal fuse and a bonding pad. The bonding pad is electrically connected to the conductive layer via the opening. Both the metal fuse and the bonding pad have undercut sidewalls. Spacers are formed on the undercut sidewalls of the metal fuse and the bonding pad. Finally, a passivation layer that exposes the metal fuse and the bonding pad is formed over the substrate.
Public/Granted literature
- US20020155672A1 Method of forming metal fuse Public/Granted day:2002-10-24
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