Invention Grant
- Patent Title: Abrasive composition containing organic particles for chemical mechanical planarization
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Application No.: US10023827Application Date: 2001-12-21
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Publication No.: US06620215B2Publication Date: 2003-09-16
- Inventor: Yuzhuo Li , Guomin Bian , Kwok Tang , Joe Zunzi Zhao , John Westbrook , Yong Lin , Leina Chan
- Applicant: Yuzhuo Li , Guomin Bian , Kwok Tang , Joe Zunzi Zhao , John Westbrook , Yong Lin , Leina Chan
- Main IPC: C09K314
- IPC: C09K314

Abstract:
The present invention is drawn to a composition comprising abrasive particles comprising an organic resin for chemical mechanical planarization (CMP), which can be widely used in the semiconductor industry. The abrasive composition is an aqueous slurry comprising abrasive particles comprising an organic resin, wherein the slurry is held at a pH in the range of 2-12. An attractive feature of the inventive abrasive composition is that it can be tailored to selectively remove different components from the surface. The inventive abrasive composition also provides efficient polishing rates and good surface quality when used in CMP applications.
Public/Granted literature
- US20030136055A1 Abrasive composition containing organic particles for chemical mechanical planarization Public/Granted day:2003-07-24
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