发明授权
- 专利标题： Substrate coated with an MGO-layer
- 专利标题（中）： 涂有MGO层的基材
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申请号： US08985880申请日： 1997-12-05
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公开(公告)号： US06623607B1公开(公告)日： 2003-09-23
- 发明人: Johannes Stollenwerk , Christoph Daube , Achim Gürke
- 申请人： Johannes Stollenwerk , Christoph Daube , Achim Gürke
- 优先权： EP97120354 19971120
- 主分类号： C23C1434
- IPC分类号： C23C1434
摘要：
A method and apparatus for producing a substrate which is coated with a Mgo-layer, includes a pair of Mg targets which define a slit and which have a target purity of at least 99 percent. A working gas flows along the slit. Oxygen is provided in an area between the slit and the substrate to be coated. The temperature of the substrate is set by heating or cooling the substrate during the coating process.
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