发明授权
- 专利标题: Polishing apparatus
- 专利标题(中): 抛光设备
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申请号: US09893625申请日: 2001-06-29
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公开(公告)号: US06626736B2公开(公告)日: 2003-09-30
- 发明人: Manabu Tsujimura , Norio Kimura
- 申请人: Manabu Tsujimura , Norio Kimura
- 优先权: JP2000-199923 20000630
- 主分类号: B24B100
- IPC分类号: B24B100
摘要:
A polishing apparatus is used for polishing a workpiece such as a semiconductor wafer to a flat mirror finish, and allows a polishing pad to be automatically replaced without stopping rotary or circulatory motion of a polishing table. The polishing apparatus comprises a polishing table for making rotary or circulatory motion, a top ring vertically movably disposed above the polishing table for removably holding a workpiece to be polished, a pair of rolls rotatable about their own axes and movable in unison with the polishing table, and a polishing pad which is wound on one of the rolls and supplied over an upper surface of the polishing table toward the other of the rolls.
公开/授权文献
- US20020013124A1 Polishing apparatus 公开/授权日:2002-01-31
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