- 专利标题: Superconductor incorporating therein superconductivity epitaxial thin film and manufacturing method thereof
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申请号: US09994609申请日: 2001-11-28
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公开(公告)号: US06626995B2公开(公告)日: 2003-09-30
- 发明人: Jun Ho Kim , Sang Hyeob Kim , Gun Yong Sung
- 申请人: Jun Ho Kim , Sang Hyeob Kim , Gun Yong Sung
- 优先权: KR2001/30890 20010601
- 主分类号: C30B2502
- IPC分类号: C30B2502
摘要:
The present invention utilizes magnesium diboride (MgB2) or (Mg1−xMx)B2 as a superconductivity thin film which can be applied to a rapid single flux quantum (RSFQ) circuit. A method for manufacturing a superconductor incorporating therein a superconductivity thin film, begins with preparing a single crystal substrate. Thereafter, a template film is formed on top of the substrate, wherein the template has a hexagonal crystal structure. The superconductivity thin film of MgB2 or (Mg1−xMx)B2 is formed on top of the template film. If Mg amount in the superconductivity thin film is insufficient, Mg vapor is flowed on the surface of the superconductivity thin film while a post annealing process is carried out at the temperature ranging from 400° C. to 900° C.
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