发明授权
- 专利标题: Memory cell arrangement
- 专利标题(中): 存储单元布置
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申请号: US09937838申请日: 2002-02-05
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公开(公告)号: US06627940B1公开(公告)日: 2003-09-30
- 发明人: Dirk Schumann , Bernhard Sell , Hans Reisinger , Josef Willer
- 申请人: Dirk Schumann , Bernhard Sell , Hans Reisinger , Josef Willer
- 优先权: DE19914490 19990330
- 主分类号: H01L27108
- IPC分类号: H01L27108
摘要:
A memory-cell array includes a substrate forming parallel first and second trenches. A transistor's upper source/drain region adjoins two of the first and two of the second trenches, and lies above its lower source/drain region. A conductive structure in a first trench associated with the transistor adjoins the upper source/drain region at its first edge. An insulating structure in the associated first trench insulates the conductive structure from a second edge and from a bottom of the associated first trench. A word line, on which is a further insulating layer, is over the upper/source drain region and parallel to the associated first trench bulges into the second trenches. Insulating spaces adjoin the word line laterally. A contact on the conductive structure and in electrical communication with the upper source/drain region connects with a capacitor.
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