发明授权
- 专利标题: Method for forming graphical images in semiconductor devices
- 专利标题(中): 在半导体器件中形成图形图像的方法
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申请号: US09680879申请日: 2000-10-06
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公开(公告)号: US06629292B1公开(公告)日: 2003-09-30
- 发明人: Phillip L. Corson , Gary R. Holsopple , Jason M. Parry , William F. Pokorny
- 申请人: Phillip L. Corson , Gary R. Holsopple , Jason M. Parry , William F. Pokorny
- 主分类号: G06F1750
- IPC分类号: G06F1750
摘要:
High resolution gray scale graphical images are formed in a semiconductor substrate by the use of two or more levels of indicia having a plurality of image segments and having a continuous conductive line formed in the surface of the substrate, each image segment includes a portion of said continuous conductive line and a contrasting material providing pixels in which the width of the line within a segment varies in relationship to gray scale levels in the graphic image to be formed. Providing a graphic image to be converted; converting the graphic image to a gray level, two dimensional bit mapped converting the bit mapped image into a set of parallel lines of varying width; each line comprising a single continuous segment in which the width varies based on the density of the gray level required to form the gray level image; and transferring the set of lines to a pattern of conductor/insulator lines on a substrate.
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