公开(公告)号：US06629292B1

公开(公告)日：2003-09-30

申请号：US09680879

申请日：2000-10-06

申请人： Phillip L. Corson ,  Gary R. Holsopple ,  Jason M. Parry ,  William F. Pokorny

发明人： Phillip L. Corson ,  Gary R. Holsopple ,  Jason M. Parry ,  William F. Pokorny

IPC分类号： G06F1750

CPC分类号： H01L23/544 ,  H01L2223/54406 ,  H01L2223/54413 ,  H01L2924/0002 ,  H01L2924/00

摘要： High resolution gray scale graphical images are formed in a semiconductor substrate by the use of two or more levels of indicia having a plurality of image segments and having a continuous conductive line formed in the surface of the substrate, each image segment includes a portion of said continuous conductive line and a contrasting material providing pixels in which the width of the line within a segment varies in relationship to gray scale levels in the graphic image to be formed. Providing a graphic image to be converted; converting the graphic image to a gray level, two dimensional bit mapped converting the bit mapped image into a set of parallel lines of varying width; each line comprising a single continuous segment in which the width varies based on the density of the gray level required to form the gray level image; and transferring the set of lines to a pattern of conductor/insulator lines on a substrate.

摘要翻译： 通过使用具有多个图像段的两个或更多个级别的标记并且在衬底的表面中形成有连续导电线，在半导体衬底中形成高分辨率灰度图形图像，每个图像段包括所述 连续导电线和提供像素的对比材料，其中片段内的线的宽度与要形成的图形图像中的灰度级别相关。 提供要转换的图形图像; 将图形图像转换为灰度级，二维比特映射将位映射图像转换成一组不同宽度的平行线; 每条线包括单个连续段，其中宽度基于形成灰度级图像所需的灰度级的密度而变化; 以及将所述一组线转移到衬底上的导体/绝缘体线的图案。