发明授权
- 专利标题: Ultrasonic cleaning apparatus and ultrasonic cleaning method
- 专利标题(中): 超声波清洗设备和超声波清洗方法
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申请号: US09964441申请日: 2001-09-28
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公开(公告)号: US06630768B2公开(公告)日: 2003-10-07
- 发明人: Takahisa Yamashiro , Noriyuki Kitaori , Kiyoteru Osawa , Masayasu Sato
- 申请人: Takahisa Yamashiro , Noriyuki Kitaori , Kiyoteru Osawa , Masayasu Sato
- 优先权: JPP2000-297392 20000928; JPP2001-052872 20010227
- 主分类号: H01L4109
- IPC分类号: H01L4109
摘要:
An ultrasonic cleaning apparatus comprises: a power amplifier for amplifying an amplitude of a signal to supply the signal as power to the ultrasonic oscillator; a phase comparator for obtaining a difference between a phase of a current flowing through the ultrasonic oscillator and a phase of a voltage applied to the ultrasonic oscillator and for generating a voltage in accordance with the phase difference; and a voltage control oscillation device for generating a frequency of the signal in accordance with the voltage generated by the phase comparator and for controlling the frequency so that the phase difference is kept within ±30°, wherein the power supplied to the ultrasonic oscillator is regulated to a range from 1W to 10W, and a difference between a resonance frequency of the ultrasonic oscillator and an anti-resonance frequency thereof is regulated to 1 kHz or more.
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