- 专利标题: Reticle stop block apparatus and method
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申请号: US09894482申请日: 2001-06-28
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公开(公告)号: US06630988B2公开(公告)日: 2003-10-07
- 发明人: Daniel Lawson Greene, Jr. , Ron Sinicki , Kurt Woolley
- 申请人: Daniel Lawson Greene, Jr. , Ron Sinicki , Kurt Woolley
- 主分类号: G03B2762
- IPC分类号: G03B2762
摘要:
Methods and apparatus for ensuring the proper handling of reticles in the manufacturing of microdevices are disclosed. The methods and apparatus employ one or more reticle stop blocks fixed to a reticle handling arm. The one or more reticle stop blocks are designed and arranged to engage an edge of the reticle in order to place the reticle in a desired position on the reticle handling arm should the reticle be improperly arranged in a cassette in which the reticle is stored. By ensuring proper placement of the reticle on the reticle handling arm when the reticle is removed from the cassette, the likelihood of a subsequent fault in handling the reticle is greatly reduced.
公开/授权文献
- US20030002025A1 Reticle stop block apparatus and method 公开/授权日:2003-01-02
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