发明授权
- 专利标题： Process for making a color selective Si detector array
- 专利标题（中）： 制作色选Si检测器阵列的方法
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申请号： US09704407申请日： 2000-11-02
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公开(公告)号： US06632699B1公开(公告)日： 2003-10-14
- 发明人: Michel Marso , Michael Krüger , Michael Berger , Markus Thönissen , Hans Lüth
- 申请人： Michel Marso , Michael Krüger , Michael Berger , Markus Thönissen , Hans Lüth
- 优先权： DE19609073 19960308
- 主分类号： H01L21331
- IPC分类号： H01L21331
摘要：
A multiplicity of components form a photodiode array on a substrate. Each of the components consists of a transistor of the p-n-p type with the outermost p-doped layer being transformed into an optical filter by control of the anodic etching operation utilizing transistor characteristics of the respective transistor. The result can provide red, blue and green filters in a color camera.
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