Invention Grant
US06633711B1 Focused ion-beam fabrication of fiber probes for use in near field scanning optical microscopy
失效
用于近场扫描光学显微镜的光纤探头的聚焦离子束制造
- Patent Title: Focused ion-beam fabrication of fiber probes for use in near field scanning optical microscopy
- Patent Title (中): 用于近场扫描光学显微镜的光纤探头的聚焦离子束制造
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Application No.: US09584788Application Date: 2000-06-01
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Publication No.: US06633711B1Publication Date: 2003-10-14
- Inventor: Saeed Pilevar , Klaus Edinger , Walid Atia , Igor I. Smolyaninov , Christopher C. Davis
- Applicant: Saeed Pilevar , Klaus Edinger , Walid Atia , Igor I. Smolyaninov , Christopher C. Davis
- Main IPC: G02B600
- IPC: G02B600

Abstract:
A method of forming a fiber probe having an aperture for use in near-field scanning optical microscopy. The method includes a first steps of coating an optical fiber having a tapered tip with a metal layer. Next is a step of milling the tapered tip and metal layer such that an aperture is formed through the metal layer at the tapered tip. The milling step includes focused ion-beam milling the tapered tip and metal layer. The focused ion-beam milling can be done by raster scanning the focused ion-beam in a rectangular pattern at an apex of the tapered tip. Also, the fiber probe made through the above outlined method is used in near-field scanning optical microscopy.
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