发明授权
- 专利标题： Permeable protective coating for a single-chip hydrogen sensor
- 专利标题（中）： 用于单芯片氢传感器的透气保护涂层
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申请号： US09788977申请日： 2001-02-20
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公开(公告)号： US06634213B1公开(公告)日： 2003-10-21
- 发明人: James M. O'Connor , Thomas C. Loughran
- 申请人： James M. O'Connor , Thomas C. Loughran
- 主分类号： H01L700
- IPC分类号： H01L700
摘要：
A permeable protective coating for a single-ship hydrogen sensor. A hydrogen-permeable coating is applied to a semiconductor wafer containing hydrogen sensor dies, prior to dicing of the wafer. The permeable coating is preferably an organic spin-on polymer, and the hydrogen sensors preferably include hydrogen-sensing elements composed of a palladium nickel alloy.