Lithography apparatus, lithography method and method of manufacturing master print for transfer
摘要:
The invention relates to a lithographic apparatus for transferring a fine pattern having a line width less than 10 &mgr;m, a lithographic method, a structure for and a method of manufacturing an original master for transfer. The lithographic apparatus comprising an original master on which a pattern is formed within a two-dimensional plane, a slit for filling a medium in the pattern, a medium sump for feeding the medium, a pressure regulating mechanism for adjusting the pressure of the medium filled in the slit, and a lithographic substrate. With this apparatus, the pattern can be batch-transferred, thereby making it possible to easily manufacture electronic parts.
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