- 专利标题: Lithography apparatus, lithography method and method of manufacturing master print for transfer
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申请号: US09960407申请日: 2001-09-24
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公开(公告)号: US06635403B2公开(公告)日: 2003-10-21
- 发明人: Akihiro Miyauchi , Lee Chahn , Mitsuru Hasegawa , Mitsuo Hayashibara , Hiroshi Sasaki
- 申请人: Akihiro Miyauchi , Lee Chahn , Mitsuru Hasegawa , Mitsuo Hayashibara , Hiroshi Sasaki
- 优先权: JP2001-022679 20010131
- 主分类号: G03F726
- IPC分类号: G03F726
摘要:
The invention relates to a lithographic apparatus for transferring a fine pattern having a line width less than 10 &mgr;m, a lithographic method, a structure for and a method of manufacturing an original master for transfer. The lithographic apparatus comprising an original master on which a pattern is formed within a two-dimensional plane, a slit for filling a medium in the pattern, a medium sump for feeding the medium, a pressure regulating mechanism for adjusting the pressure of the medium filled in the slit, and a lithographic substrate. With this apparatus, the pattern can be batch-transferred, thereby making it possible to easily manufacture electronic parts.
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