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1.发明授权公开(公告)号：US06635403B2
公开(公告)日：2003-10-21
申请号：US09960407
申请日：2001-09-24
IPC分类号： G03F726
CPC分类号： B82Y10/00 , B82Y40/00 , G03F7/0002 , H05K3/182
摘要： The invention relates to a lithographic apparatus for transferring a fine pattern having a line width less than 10 &mgr;m, a lithographic method, a structure for and a method of manufacturing an original master for transfer. The lithographic apparatus comprising an original master on which a pattern is formed within a two-dimensional plane, a slit for filling a medium in the pattern, a medium sump for feeding the medium, a pressure regulating mechanism for adjusting the pressure of the medium filled in the slit, and a lithographic substrate. With this apparatus, the pattern can be batch-transferred, thereby making it possible to easily manufacture electronic parts.
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公开(公告)号：US08083515B2
公开(公告)日：2011-12-27
申请号：US12129881
申请日：2008-05-30
申请人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
发明人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
CPC分类号： B29C33/3878 , B29C33/424 , C25D1/02 , C25D1/10 , Y10S425/81 , Y10T29/49549 , Y10T29/49552
摘要： The fine pattern mold comprises: that includes a roll, a buffer tube with inner peripheral surface is in contact with an outer peripheral surface of the roll, and a stamper tube in which its inner peripheral surface is in contact with an outer peripheral surface of the buffer tube and a fine concave/convex pattern is formed on its outer peripheral surface, wherein the buffer tube has a larger coefficient of linear expansion and a smaller elastic modulus than those of the stamper tube.
摘要翻译： 精细图案模具包括：包括辊，具有内周表面的缓冲管与辊的外周表面接触;以及压模管，其内周表面与所述辊的外周表面接触 在其外周面形成有缓冲管和细凹凸图案，其中缓冲管具有比压模管更大的线膨胀系数和更小的弹性模量。
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3.发明授权Stamper, lithographic method of using the stamper and method of forming a structure by a lithographic pattern 有权压模，使用压模的光刻方法和通过光刻图案形成结构的方法公开(公告)号：US07192529B2
公开(公告)日：2007-03-20
申请号：US10628275
申请日：2003-07-29
申请人： Mitsuru Hasegawa , Akihiro Miyauchi
发明人： Mitsuru Hasegawa , Akihiro Miyauchi
CPC分类号： B82Y10/00 , B29C33/424 , B29C43/36 , B81C99/009 , B81C2201/036 , B82Y40/00 , G03F7/0002 , G03F7/0017 , H01L21/76817
摘要： A stamper includes a substrate and a plurality of protrusions of different heights formed on one of the surfaces of the substrate, the protrusions of larger height having a stack structure formed of at least two layers of at least two types of materials, thereby transferring a plurality of patterns at the same time.
摘要翻译： 压模包括基板和形成在基板的一个表面上的不同高度的多个突起，较大高度的突起具有由至少两层至少两种类型的材料形成的堆叠结构，从而传输多个 的模式在同一时间。
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公开(公告)号：US07740703B2
公开(公告)日：2010-06-22
申请号：US10803087
申请日：2004-03-18
摘要： A semiconductor film formation device has: a reaction vessel that includes a gas flow path to allow source gas to pass through and a substrate mount site provided in the gas flow path to mount a substrate; a temperature control means that is disposed opposite to the substrate mount site and close to the reaction vessel to control the internal temperature of the reaction vessel; and a thermal conductivity adjusting member that is disposed between the reaction vessel and the temperature control means. The thermal conductivity adjusting member has a section with a thermal conductivity different from the other section along the gas flow path.
摘要翻译： 半导体膜形成装置具有：包括允许源气体通过的气体流路和设置在气体流路中的基板安装位置以安装基板的反应容器; 温度控制装置，其与基板安装位置相对设置并且靠近反应容器以控制反应容器的内部温度; 以及设置在反应容器和温度控制装置之间的导热性调节构件。 导热性调节构件具有沿着气体流动路径具有不同于另一部分的热导率的截面。
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公开(公告)号：US20090166914A1
公开(公告)日：2009-07-02
申请号：US12343550
申请日：2008-12-24
IPC分类号： B29C59/04
CPC分类号： B29C59/04 , B29C35/16 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： An imprint apparatus for forming fine structure lithography comprises: a belt-like mold having a fine structure for imprint lithography formed on a surface of the belt-like mold; a cylindrical pressurizing mechanism including a pair of opposed rolls for pressurizing the belt-like mold against the surface of the imprinting object; and a supporting member for supporting the imprinting object at a position between the rolls of the cylindrical pressurizing mechanism. The belt-like mold, the imprinting object and the supporting member are configured to move to the cylindrical pressurizing mechanism in a mutually non-contact state, and then at the position between the rolls, be pressurized by the cylindrical pressurizing mechanism in a state where the imprinting object is positioned between the belt-like mold and the supporting member.
摘要翻译： 用于形成精细结构光刻的压印装置包括：在带状模具的表面上形成具有用于压印光刻的精细结构的带状模具; 圆柱形加压机构，包括一对相对的辊，用于将带状模具压靠在压印对象的表面上; 以及用于将压印对象支撑在圆筒形加压机构的辊之间的位置处的支撑构件。 带状模具，压印对象物和支撑构件被构造成在相互非接触状态下移动到圆柱形加压机构，然后在辊之间的位置被圆柱形加压机构加压， 压印对象位于带状模具和支撑构件之间。
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公开(公告)号：US20080299247A1
公开(公告)日：2008-12-04
申请号：US12129881
申请日：2008-05-30
申请人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
发明人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
CPC分类号： B29C33/3878 , B29C33/424 , C25D1/02 , C25D1/10 , Y10S425/81 , Y10T29/49549 , Y10T29/49552
摘要： There is provided a fine pattern mold capable of transferring a fine concave/convex pattern accurately without causing deformation of the fine concave/convex pattern itself.The fine patter mold comprises: a roll; a buffer tube whose inner peripheral surface is in contact with an outer peripheral surface of the roll; and a stamper tube in which its inner peripheral surface is in contact with an outer peripheral surface of the buffer tube and a fine concave/convex pattern is formed on its outer peripheral surface, wherein the buffer tube has a larger coefficient of linear expansion and a smaller elastic modulus than those of the stamper tube.
摘要翻译： 提供了能够精确地转印精细凹凸图案的精细图案模具，而不会导致精细凹凸图案本身的变形。 精细模具包括：卷; 缓冲管，其内周面与所述辊的外周面接触; 以及其内周面与缓冲管的外周面接触的压模管，在其外周面上形成微细的凹凸图案，其中缓冲管具有较大的线膨胀系数和 比压模管的弹性模量小。
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7.发明申请Stamper, lithographic method of using the stamper and method of forming a structure by a lithographic pattern 有权压模，使用压模的光刻方法和通过光刻图案形成结构的方法公开(公告)号：US20060138080A1
公开(公告)日：2006-06-29
申请号：US11362146
申请日：2006-02-27
申请人： Mitsuru Hasegawa , Akihiro Miyauchi
发明人： Mitsuru Hasegawa , Akihiro Miyauchi
IPC分类号： B44C1/22
CPC分类号： B82Y10/00 , B29C33/424 , B29C43/36 , B81C99/009 , B81C2201/036 , B82Y40/00 , G03F7/0002 , G03F7/0017 , H01L21/76817
摘要： A stamper includes a substrate and a plurality of protrusions of different heights formed on one of the surfaces of the substrate, the protrusions of larger height having a stack structure formed of at least two layers of at least two types of materials, thereby transferring a plurality of patterns at the same time.
摘要翻译： 压模包括基板和形成在基板的一个表面上的不同高度的多个突起，较大高度的突起具有由至少两层至少两种类型的材料形成的堆叠结构，从而传输多个 的模式在同一时间。
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公开(公告)号：US20120067507A1
公开(公告)日：2012-03-22
申请号：US13307042
申请日：2011-11-30
申请人： Masahiko OGINO , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
发明人： Masahiko OGINO , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
CPC分类号： B29C33/3878 , B29C33/424 , C25D1/02 , C25D1/10 , Y10S425/81 , Y10T29/49549 , Y10T29/49552
摘要： The fine pattern mold that includes a roll, a buffer tube with inner peripheral surface is in contact with an outer peripheral surface of the roll, and a stamper tube in which its inner peripheral surface is in contact with an outer peripheral surface of the buffer tube and a fine concave/convex pattern is formed on its outer peripheral surface, wherein the buffer tube has a larger coefficient of linear expansion and a smaller elastic modulus than those of the stamper tube.
摘要翻译： 包括辊，具有内周面的缓冲管的精细图案模具与辊的外周面接触，并且压模管的内周面与缓冲管的外周面接触 并且在其外周面上形成微细的凹凸图案，其中缓冲管具有比压模管更大的线膨胀系数和更小的弹性模量。
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公开(公告)号：US08387255B2
公开(公告)日：2013-03-05
申请号：US13307042
申请日：2011-11-30
申请人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
发明人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
CPC分类号： B29C33/3878 , B29C33/424 , C25D1/02 , C25D1/10 , Y10S425/81 , Y10T29/49549 , Y10T29/49552
摘要： The fine pattern mold that includes a roll, a buffer tube with inner peripheral surface is in contact with an outer peripheral surface of the roll, and a stamper tube in which its inner peripheral surface is in contact with an outer peripheral surface of the buffer tube and a fine concave/convex pattern is formed on its outer peripheral surface, wherein the buffer tube has a larger coefficient of linear expansion and a smaller elastic modulus than those of the stamper tube.
摘要翻译： 包括辊，具有内周面的缓冲管的精细图案模具与辊的外周面接触，并且压模管的内周面与缓冲管的外周面接触 并且在其外周面上形成微细的凹凸图案，其中缓冲管具有比压模管更大的线膨胀系数和更小的弹性模量。
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公开(公告)号：US08147234B2
公开(公告)日：2012-04-03
申请号：US12343550
申请日：2008-12-24
IPC分类号： B29C59/04
CPC分类号： B29C59/04 , B29C35/16 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： An imprint apparatus for forming fine structure lithography comprises: a belt-like mold having a fine structure for imprint lithography formed on a surface of the belt-like mold; a cylindrical pressurizing mechanism including a pair of opposed rolls for pressurizing the belt-like mold against the surface of the imprinting object; and a supporting member for supporting the imprinting object at a position between the rolls of the cylindrical pressurizing mechanism. The belt-like mold, the imprinting object and the supporting member are configured to move to the cylindrical pressurizing mechanism in a mutually non-contact state, and then at the position between the rolls, be pressurized by the cylindrical pressurizing mechanism in a state where the imprinting object is positioned between the belt-like mold and the supporting member.
摘要翻译： 用于形成精细结构光刻的压印装置包括：在带状模具的表面上形成具有用于压印光刻的精细结构的带状模具; 圆柱形加压机构，包括一对相对的辊，用于将带状模具压靠在压印对象的表面上; 以及用于将压印对象支撑在圆筒形加压机构的辊之间的位置处的支撑构件。 带状模具，压印对象物和支撑构件被构造成在相互非接触状态下移动到圆柱形加压机构，然后在辊之间的位置被圆柱形加压机构加压， 压印对象位于带状模具和支撑构件之间。
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