发明授权
US06638689B1 Photoresist compositions and flexible printed wiring boards with protective layer
有权
光刻胶组合物和具有保护层的柔性印刷线路板
- 专利标题: Photoresist compositions and flexible printed wiring boards with protective layer
- 专利标题(中): 光刻胶组合物和具有保护层的柔性印刷线路板
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申请号: US09288240申请日: 1999-04-08
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公开(公告)号: US06638689B1公开(公告)日: 2003-10-28
- 发明人: Satoshi Takahashi , Akira Tsutsumi , Koichi Uno , Minoru Nagashima
- 申请人: Satoshi Takahashi , Akira Tsutsumi , Koichi Uno , Minoru Nagashima
- 优先权: JP10-099336 19980410
- 主分类号: G03F740
- IPC分类号: G03F740
摘要:
Photoresist compositions, which can attain high-accuracy etching without causing separation and flexible printed wiring boards prepared with the photoresist compositions are disclosed. In order to etch a polyimide precursor layer on a conductive circuit, a photoresist composition comprising a photopolymerizable organic material (A), a water-soluble resin (B) and an amino-group-containing resin (C) is applied on the surface of the polyimide precursor layer to form a photoresist layer. Then, the photoresist layer is patterned by a photolithographic process. The polyimide precursor layer is etched and the pattern of the photoresist layer is transferred to the polyimide precursor layer. The amino-group-containing resin (C) in the photoresist layer is combined with an acid anhydride in the polyimide precursor layer to attain good adhesion and high-accuracy etching without causing separation of the photoresist layer. Alternatively, a film can be formed from the photoresist composition and then be applied on the surface of the polyimide precursor layer to form a photoresist layer.
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