发明授权
- 专利标题: Optically controlled MEM switches
- 专利标题(中): 光控MEM开关
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申请号: US09978314申请日: 2001-10-15
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公开(公告)号: US06639205B2公开(公告)日: 2003-10-28
- 发明人: Tsung-Yuan Hsu , Robert Y. Loo , Greg Tangonan , Juan F. Lam
- 申请人: Tsung-Yuan Hsu , Robert Y. Loo , Greg Tangonan , Juan F. Lam
- 主分类号: G01J136
- IPC分类号: G01J136
摘要:
An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactivate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switch without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control.
公开/授权文献
- US20020023999A1 Optically controlled MEM switches 公开/授权日:2002-02-28
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