发明授权
- 专利标题： Acetylenic diol surfactant solutions and methods of using same
- 专利标题（中）： 乙二醇表面活性剂溶液及其使用方法
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申请号： US10218068申请日： 2002-08-12
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公开(公告)号： US06641986B1公开(公告)日： 2003-11-04
- 发明人: Peng Zhang , Danielle Megan King , Eugene Joseph Karwacki , Leslie Cox Barber
- 申请人： Peng Zhang , Danielle Megan King , Eugene Joseph Karwacki , Leslie Cox Barber
- 主分类号： G03F730
- IPC分类号： G03F730
摘要：
Aqueous solutions comprising one or more acetylenic diol type surfactants are used to improve the wettability of a substrate surface by lowering the contact angle of the aqueous developer solution are enclosed herein. In one embodiment, the aqueous solution is used to prepare the surface of the substrate prior to development of the resist coating layer.
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