- 专利标题: Flash memory cell and method of manufacturing the same
-
申请号: US10224561申请日: 2002-08-21
-
公开(公告)号: US06642110B2公开(公告)日: 2003-11-04
- 发明人: Sung Mun Jung , Sung Bo Sim , Kwi Wook Kim
- 申请人: Sung Mun Jung , Sung Bo Sim , Kwi Wook Kim
- 优先权: KR98-61376 19981230
- 主分类号: H01L218247
- IPC分类号: H01L218247
摘要:
There is disclosed a flash memory cell and method of manufacturing the same, in which the circular hole is formed in the insulating film formed on the silicon substrate, the floating gate having a cylindrical shape is formed within the hole and the control gate is formed within the floating gate. Therefore, the source used as a current supply and the silicon substrate may be formed integratedly, and also the process of forming a device separation film can be omitted, thus allowing manufacturing an ultra high integration nonvolatile memory device.
公开/授权文献
- US20030003663A1 Flash memory cell and method of manufacturing the same 公开/授权日:2003-01-02
信息查询