发明授权
US06642813B1 Surface acoustic wave device utilizing a ZnO layer and a diamond layer
有权
使用ZnO层和金刚石层的声表面波器件
- 专利标题： Surface acoustic wave device utilizing a ZnO layer and a diamond layer
- 专利标题（中）： 使用ZnO层和金刚石层的声表面波器件
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申请号： US10089816申请日： 2002-04-04
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公开(公告)号： US06642813B1公开(公告)日： 2003-11-04
- 发明人: Katsuhiro Itakura , Akihiro Hachigo , Satoshi Fujii , Hideaki Nakahata , Shinichi Shikata
- 申请人： Katsuhiro Itakura , Akihiro Hachigo , Satoshi Fujii , Hideaki Nakahata , Shinichi Shikata
- 优先权： JP11-293621 19991015
- 主分类号： H03H964
- IPC分类号： H03H964
摘要：
A surface acoustic wave (SAW) device that is made with diamond, that has high efficiency, and that can be operated at high frequencies, particularly from 9.5 to 10.5 GHz. The SAW device comprises a diamond layer formed singly or formed on a substrate, a ZnO piezoelectric layer, interdigital transducers (IDTs), and a short-circuiting electrode as required. The SAW device has a structure in which the thickness of the ZnO layer, the wavelength of a harmonic of the SAW, and the line width of the IDTs fall in a specified range. With this structure, a large electromechanical coupling coefficient is obtained in a high-frequency range of 10 GHz band by utilizing the third or fifth harmonic of the SAW.
公开/授权文献
- US1221021A Dredge-cutter. 公开/授权日：1917-04-03