发明授权
US06645355B2 Semiconductor processing apparatus having lift and tilt mechanism 失效
具有升降机构的半导体处理装置

Semiconductor processing apparatus having lift and tilt mechanism
摘要:
A lift/tilt assembly for use in a semiconductor wafer processing device is set forth. The lift/tilt assembly includes a linear guide comprising a fixed frame and a moveable frame. A nest for accepting a plurality of semiconductor wafers is rotatably connected to the moveable frame. The nest rotates between a wafer-horizontal orientation and a wafer-vertical orientation as it is driven with the movable frame by a motor that is coupled to the linear way. A lever connected to the nest provides an offset from true vertical for the nest when the nest is in the wafer-vertical orientation.
信息查询
0/0