发明授权
- 专利标题: Device manufacturing method
- 专利标题(中): 器件制造方法
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申请号: US09534334申请日: 2000-03-24
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公开(公告)号: US06645707B2公开(公告)日: 2003-11-11
- 发明人: Mitsuaki Amemiya , Shunichi Uzawa , Keiko Chiba , Yutaka Watanabe
- 申请人: Mitsuaki Amemiya , Shunichi Uzawa , Keiko Chiba , Yutaka Watanabe
- 优先权: JP11-085862 19990329
- 主分类号: G03C556
- IPC分类号: G03C556
摘要:
A device manufacturing method includes a first exposure step for executing a multiple exposure of a first layer of a substrate by use of plural first masks, a development step for developing the first layer of the substrate and a second exposure step, executed after the development step, for executing a multiple exposure of a second layer of the substrate by use of plural second masks. A portion of at least one of the first masks has a pattern the same as a pattern formed in a portion of at least one of the second masks.
公开/授权文献
- US20030143496A1 DEVICE MANUFACTURING METHOD 公开/授权日:2003-07-31