发明授权
- 专利标题: Semiconductor device
- 专利标题(中): 半导体器件
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申请号: US09985020申请日: 2001-11-01
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公开(公告)号: US06646306B2公开(公告)日: 2003-11-11
- 发明人: Toshiaki Iwamatsu , Takashi Ipposhi , Hideki Naruoka , Nobuyoshi Hattori , Shigeto Maegawa , Yasuo Yamaguchi , Takuji Matsumoto
- 申请人: Toshiaki Iwamatsu , Takashi Ipposhi , Hideki Naruoka , Nobuyoshi Hattori , Shigeto Maegawa , Yasuo Yamaguchi , Takuji Matsumoto
- 优先权: JP2000-354043 20001121
- 主分类号: H01L2701
- IPC分类号: H01L2701
摘要:
A semiconductor device that prevents metal pollution and a method of manufacturing the semiconductor device. A region (NR) and a region (PR) are defined by a trench isolation oxide film, a polysilicon film selectively provided on the trench isolation oxide film, a silicon layer provided on the polysilicon film, and a side wall spacer provided on a side surface of the polysilicon film. The polysilicon film is provided in a position corresponding to a top of a PN junction portion JP of a P-type well region and an N-type well region in a SOI layer across the two well regions.
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