- 专利标题: Triode-type field emission device having field emitter composed of emitter tips with diameter of nanometers and method for fabricating the same
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申请号: US10263580申请日: 2002-10-02
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公开(公告)号: US06648712B2公开(公告)日: 2003-11-18
- 发明人: Sung-Yool Choi , Mun-Cheol Paek , Kyoung-Ik Cho , Jeen Hur , Gi-Pyung Han
- 申请人: Sung-Yool Choi , Mun-Cheol Paek , Kyoung-Ik Cho , Jeen Hur , Gi-Pyung Han
- 优先权: KR1999-30373 19990726
- 主分类号: H01J904
- IPC分类号: H01J904
摘要:
A triode-type field emission device includes an insulating substrate; a cathode formed on the insulating substrate; a field emitter aligned on the cathode, wherein the field emitter includes a plurality of emitter tips and each emitter tip has the diameter of nanometers; an insulating layer positioned around the field emitter for electrically isolating the field emitter; and a gate electrode formed on the insulating layer, wherein the gate electrode is closed to an upper portion of the field emitter. Therefore, the triode-type field emission device may be operable in a low voltage.
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