- 专利标题: Polishing pads and methods relating thereto
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申请号: US09848894申请日: 2001-05-04
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公开(公告)号: US06648733B2公开(公告)日: 2003-11-18
- 发明人: John V. H. Roberts , David B. James , Lee Melbourne Cook , Ronald D. Bakule
- 申请人: John V. H. Roberts , David B. James , Lee Melbourne Cook , Ronald D. Bakule
- 主分类号: B24B100
- IPC分类号: B24B100
摘要:
A polishing pad with a polishing layer having a macro-texture and a micro-texture wherein the polishing layer is formed by solidifying a flowable material, the polishing layer further comprising hard domains and soft domains, each domain having an average size less than 100 microns.
公开/授权文献
- US20020077036A1 Polishing pads and methods relating thereto 公开/授权日:2002-06-20
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