Invention Grant
- Patent Title: Micro-electro mechanical system
- Patent Title (中): 微机电系统
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Application No.: US09929750Application Date: 2001-08-14
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Publication No.: US06649852B2Publication Date: 2003-11-18
- Inventor: Marc Chason , Andrew Skipor , Aroon Tungare , Daniel Gamota , Sanjar Ghaem
- Applicant: Marc Chason , Andrew Skipor , Aroon Tungare , Daniel Gamota , Sanjar Ghaem
- Main IPC: H01H3900
- IPC: H01H3900

Abstract:
The organic MEMS according to the present invention comprises a polymeric substrate comprising a substrate surface including a first region and a second region. A polymer coating is applied to the first region to provide a coating surface that is spaced apart from the substrate surface. A terminal is disposed on the second region. A metallic trace is affixed to the coating surface such that the metallic trace forms a flexible extension over the second region. The extension has a rest position where the extension is spaced apart from the terminal, and a flexed position where the extension is disposed towards the terminal. An actuator is used to provide an electric field to deflect the extension from the rest position to the flexed position. By changing the spacing between the extension and the terminal, it is possible to change the electrical condition provided by the MEMS.
Public/Granted literature
- US20030034239A1 Micro-electro mechanical system Public/Granted day:2003-02-20
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