- Patent Title: Methods of forming protective segments of material, and etch stops
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Application No.: US10098680Application Date: 2002-03-12
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Publication No.: US06653241B2Publication Date: 2003-11-25
- Inventor: Mark E. Jost , Keith Cook , Erik Byers
- Applicant: Mark E. Jost , Keith Cook , Erik Byers
- Main IPC: H01L21302
- IPC: H01L21302

Abstract:
The invention encompasses a method of forming a protective segment of material. A plurality of at least three conductive lines are provided over a semiconductor substrate. A material is formed over the conductive lines, and a patterned masking layer is formed to cover a segment of the material extending between a pair of the conductive lines while leaving another segment of the material uncovered. The uncovered segment of the material is anisotropically etched to form separated spacers from the uncovered segment. The separated spacers are along sidewalls of at least two of the conductive lines. The covered segment of the material remains after the anisotropic etching, and is a protective segment of the material over the semiconductor substrate.
Public/Granted literature
- US20030176076A1 METHODS OF FORMING PROTECTIVE SEGMENTS OF MATERIAL, AND ETCH STOPS Public/Granted day:2003-09-18
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