Invention Grant
- Patent Title: Buffer layer structures for stabilization of a lithium niobate device
- Patent Title (中): 用于稳定铌酸锂器件的缓冲层结构
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Application No.: US10035193Application Date: 2002-01-04
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Publication No.: US06654512B2Publication Date: 2003-11-25
- Inventor: Williams K. Burns , Larry A. Hess , Vishal Agarwal
- Applicant: Williams K. Burns , Larry A. Hess , Vishal Agarwal
- Main IPC: G02F1035
- IPC: G02F1035

Abstract:
An optical waveguide device including an electro-optical crystal substrate having a top surface and a bottom surface; an optical waveguide path formed within a surface of the electro-optical crystal substrate; at least one electrode positioned above the optical waveguide path for applying an electric field to the optical waveguide path; and a silicon titanium oxynitride layer and a connecting layer for interconnecting the silicon titanium oxynitride layer to another surface of the electro-optical crystal substrate that is opposite to the surface in which the optical waveguide path is formed.
Public/Granted literature
- US20030128930A1 Buffer layer structures for stabilization of a lithium niobate device Public/Granted day:2003-07-10
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