发明授权
- 专利标题: Focusing-device for the radiation from a light source
- 专利标题(中): 用于来自光源的辐射的聚焦装置
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申请号: US09950186申请日: 2001-09-10
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公开(公告)号: US06655808B2公开(公告)日: 2003-12-02
- 发明人: Martin Antoni , Frank Melzer , Andreas Seifert , Wolfgang Singer
- 申请人: Martin Antoni , Frank Melzer , Andreas Seifert , Wolfgang Singer
- 优先权: DE10045265 20000913
- 主分类号: G02B508
- IPC分类号: G02B508
摘要:
A focusing-device for the radiation from a light source, in particular a laser plasma source, has a collector mirror which collects the light from the light source at a second focus in virtual or real terms, in particular for micro-lithography using EUV radiation, and a routing unit and downstream beam formation in an illuminating system. The collector mirror can be displaced in the z-direction (optical axis) and is designed and/or mounted in such a way that the position of the second focus remains unchanged in the event of temperature changes.
公开/授权文献
- US20020113954A1 Focusing-device for the radiation from a light source 公开/授权日:2002-08-22