Invention Grant
US06656372B2 Methods of making magnetoresistive memory devices 有权
制造磁阻存储器件的方法

  • Patent Title: Methods of making magnetoresistive memory devices
  • Patent Title (中): 制造磁阻存储器件的方法
  • Application No.: US09971758
    Application Date: 2001-10-04
  • Publication No.: US06656372B2
    Publication Date: 2003-12-02
  • Inventor: Donald L. Yates
  • Applicant: Donald L. Yates
  • Main IPC: G11B5127
  • IPC: G11B5127
Methods of making magnetoresistive memory devices
Abstract:
The invention includes methods of forming magnetoresistive devices. In one method, a construction is formed which includes a first magnetic layer, a non-magnetic layer over the first magnetic layer, and a second magnetic layer over the non-magnetic layer. A first pattern is extended through the second magnetic layer and to the non-magnetic layer with an etch selective for the material of the second magnetic layer relative to the material of the non-magnetic layer. A dielectric material is formed over the patterned second magnetic layer, and subsequently a second etch is utilized to extend a second pattern through the non-magnetic layer and at least partway into the first magnetic layer.
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